Nanoscribe GmbH - True 3D Laser Lithography
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2D Photonics

2D photonic applications benefit from the high resolution enabled by the two-photon polymerization of Nanoscribe’s laser lithography systems. Depending on the photochemistry of resists used and the focusing optics minimum feature sizes of about 150 nm can be achieved. This bridges the gap between electron beam lithography and direct laser writing systems based on 1-photon absorption. Examples of applications include – among others - diffractive optical elements (DOEs) and gratings, metamaterials, optical security labels, optical waveguides as well as biomimetics. Please click on the thumbnails to open a detailed view and the corresponding figure captions.

Gratings with different lattice constants produce this colurful image on a silicon substrate.
Another colorful example of gratings with varying lattive constants on a silicon substrate.
4x4 mm² array of lines on a 170 µm thin glass substrate.
Tilted gratings.
Tilted gratings.
Split-ring resonators written into the negative-tone photoresist SU-8.
High aspect ratio pillars written into the negative tone photoresist SU-8.
Cross-grid written into the negative tone resist AZ 5214E.
Cross-grid written into the positive tone resist AZ MiR 701.
Lines written into the negative-tone photoresist SU-8.
Grating with 300nm periodicity and sub-90nm-linewidth; material: IP-L
Polymer 2D pattern along the publication "Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction" by Nanfang Yu, et al.
Polymer 2D pattern along the publication "Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction" by Nanfang Yu, et al.
Polymer 2D pattern along the publication "Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction" by Nanfang Yu, et al.
Polymer 2D pattern along the publication "Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction" by Nanfang Yu, et al.
Polymer 2D pattern along the publication "Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction" by Nanfang Yu, et al.
2D polymeric Y-shaped photonic waveguide coupler.
A printed circuit board (PCB) design realized by two photon polymerization in a positive tone photoresist.

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