Nanoscribe GmbH - True 3D Laser Lithography
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2.5D Micro-Optics

Multi-photon polymerization by means of Nanoscribe’s direct laser writing systems allows for the fabrication of complex and replicable 2.5D structures. Polymer micro-optics can be used as moulds for replication or masters for pattern transfer. The key advantage compared to 2.5D gray scale lithography or 2D UV-exposure and subsequent reflow techniques is clear: Arbitrary complex shapes can be fabricated in one single step – may it be refractive optics such as arrays of aspheres, diffractive optics such as Fresnel lenses or even stacked micro-lenses. In addition to this, negative-tone resists may be used which are less sensitive to the development process compared to positive-tone resists - thus allowing for high reproducibility of the complete process. Furthermore, micro-optics of up to several 100 µm height can be fabricated with optimal resolution: No necessity to leverage the height via Reactive Ion Etching (RIE) into the underlying substrate! Please click on the thumbnails to open a detailed view as well as explanations.

Pyramid array for applications in micro-optics.
Micro-lens arary fabricated with two-photon polymerization.
An array of octagon pyramids made by direct laser writing.
This polymer micro-tetrahedron array was fabricated with direct laser writing.
Micro-pyramid array fabricated by means of wo-photon polymerization.
Blazed gratings fabricated by M. Thiel (thiel@nanoscribe.de).
Combined gratings fabricated by M. Thiel (thiel@nanoscribe.de).
Lamellar gratings fabricated by M. Thiel (thiel@nanoscribe.de).
Trapez gratings fabricated by M. Thiel (thiel@nanoscribe.de).
Twisted triangle gratings made from Ormocomp by M. Thiel (thiel@nanoscribe.de).
Aspheric pair of stacked micro-lenses fabricated by a Photonic Professional laser lithography system.
Phase masks made from Ormocomp by M. Thiel (thiel@nanoscribe.de).
Pyramids made from Ormocomp by M. Thiel (thiel@nanoscribe.de).
Semispheres made from Ormocomp by M. Thiel (thiel@nanoscribe.de).
Fresnel lens fabricated by M. Thiel (thiel@nanoscribe.de).
Micro-pyramids fabricated with Ormocomp by Benjamin Zimmer (zimmer@nanoscribe.de).
Top-view of the micro-pyramids fabricated by Benjamin Zimmer (zimmer@nanoscribe.de).

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