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SSI and SDI

Through silicon-single-inversion (SSI) and silicon-double-inversion (SDI), polymer based network-like 3D structures can be casted into silicon. Exemplified are woodpile photonic crystals and a photonic quasicrystals. The principle has also been proven to work with butterfly wings. Please click on the thumbnails to open a detailed view and explaining figure captions.

The first row of images shows the double inversion of polymer-based network-like micro-structures into silicon.
Second step: The polymer structure is inverted into silica via ALD.
Third step: The silica structure is inverted into silicon via CVD and RIE.
The next three figures show the single inversion of polymer-based network-like photonic crystals into silicon.
Second step: The polymer template is coated with a thin layer of silica via ALD at room temperature.
Third step: The SiO2/polymer hybrid structure is inverted into silicon.
A 3D photonic quasicrystal with a five-fold symmetry made out of silicon.

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